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Inline Multi - Process Tool - FLEX5000

Inline Multi - Process Tool - FLEX5000

FLEX5000- Inline multi process and multi chambers prototyping production tool, with deposition up to 20" square substrates. Processes include PECVD, HWCVD, ICP and Sputtering. State of the art thin film process recipe for various thin films and devices


Example of FLEX5020- four (4) PECVD process zones, one (1) multi-source magnetron sputtering zone, load / unload module, includes vertical upwards and downwards deposition on to 20" square substrates (can take nine 5" pseudo square wafers) up to 400°C substrate heating capability for HIT solar cells application.


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