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Multi - Process Cluster Tool - FLEX3000

Multi - Process Cluster Tool - FLEX3000

FLEX3000- Multi process and multi chambers tool, up to eight (8) process zones (Cluster Tool) with a central robotic module with deposition up to 4" (3004) and 8" (3008) round wafers. Processes include PECVD, HWCVD, ICP and Sputtering. State of the art thin film process recipe for various thin films and devices



Example of FLEX3008- Six (6) PECVD process zones with a central robotic module for vertical upwards deposition up to 8" (3008) round wafers and 400°C substrate heating capability


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