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Sheet Resistance Mapping System - EddyCus® TF map 2020SR

Sheet Resistance Mapping System - EddyCus® TF map 2020SR

The EddyCus® TF map series is dedicated to fast mapping of sheet resistance, assessment of layer homogeneity, and the detection of local effects and defects. Systems are available as free standing test stands or desktop devices with user friendly software.


• Sheet resistance range: 0.001 to 1000 Ohm/sq (other on request),
• Mapping area: 200 x 200 or 400 x 400 or 600 x 600 mm2 ,
• Thickness measurement of thin films (e.g. copper) - 1nm to 500 µm (in accordance with sheet resistance)


Testing Applications


• Sheet resistance mapping of TCO/TCMs, metals, and wafers
• Layer thickness mapping of metallic thin films
• Homogeneity mapping and defect detection (e.g. impurities, cracks, deposition effects)
• Assessment of structured conductive thin films
• Crack detection, wafer testing and material sorting




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