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Spectroscopic Ellipsometers

Spectroscopic Ellipsometers

Spectroscopic ellipsometer family
SENresearch

Large variety of options for R & D and routine
applications from DUV to NIR


. Widest spectral range 190 - 3,500 nm
. Step Scan Analyzer principle for highest measurement accuracy
. Proprietary ellipsometer software SpectraRay/3


Cost-effective ellipsometer
SENpro
Focused on speed and accuracy for the measurement of thin films (1 nm to 15 µm)

. Spectral range 370 -1,050 nm
. Goniometer with preset angles of incidence
. Step Scan Analyzer principle for highest measurement accuracy
. Spectroscopic ellipsometer software SpectraRay LT

Infrared spectroscopic ellipsometer
SENDIRA
Vibrational spectroscopic analysis of thin layers
(dielectric layers, TCOs, semiconductors,
organic layers)

 

. IR spectral range 1,700 - 25,000 nm
. Fully applicable FTIR spectrometer
. Proprietary ellipsometer software SpectraRay/3







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